| 摘要 |
<p>A thin film (27) is deposited on the surface of a specimen (21) by an ECR plasma method through reaction between a plasma produced from reactive gas over the surface of the specimen (21) and atoms or molecules dissociated from a solid target material (23) by the collision of the plasma, after the surface of the solid target material (23) is cleaned with the plasma of the reactive gas.</p> |
