发明名称 SOLUTION FOR FORMING SILICA COATING FILM, PROCESS FOR PRODUCING THE SAME, AND SILICA COATING FILM AND PROCESS FOR PRODUCING THE SAME
摘要 A solution for silica coating film formation which comprises an organic solvent and a chlorosiloxane compound and can have excellent reactivity with substrates. When the solution is applied to a substrate surface in a dry atmosphere and the coated substrate is exposed to an atmosphere containing moisture, then a silica coating film excellent in durability, etc. can be produced without the need of catalyst addition or heat treatment. By adding fine anhydrous silica particles to the solution, a solution capable of viscosity control and having excellent coating film properties can be provided. When the resultant solution is applied to a substrate surface in a dry atmosphere and the coated substrate is exposed to an atmosphere containing moisture, a thick silica coating film excellent in durability, etc. can be formed without the need of catalyst addition or heat treatment. Therefore, the invention is of great industrial importance.
申请公布号 WO0026311(A1) 申请公布日期 2000.05.11
申请号 WO1999JP06143 申请日期 1999.11.04
申请人 MATSUSHITA ELECTRIC INDUSTRIAL CO., LTD.;OGAWA, KAZUFUMI;TAKEBE, TAKAKO;OTAKE, TADASHI;NOMURA, TAKAIKI 发明人 OGAWA, KAZUFUMI;TAKEBE, TAKAKO;OTAKE, TADASHI;NOMURA, TAKAIKI
分类号 C09D183/02;H01L21/312;H01L21/316;(IPC1-7):C09D183/02;C09J183/02;G02F1/136 主分类号 C09D183/02
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