| 摘要 |
<p>A filter assembly includes a construction including a media pack within the construction. In certain arrangements, a compression system exerts force to the media pack both upstream of the media pack and downstream of the media pack. Preferably, the compression system includes a compression pad or a spring both upstream and downstream of the media pack. In preferred systems, the filter assembly is used to clean a high purity gas in order to remove gaseous contaminants therefrom. One example application is in cleaning a gas that is propelled against a lens in optical lithography.</p> |
