| 摘要 |
An interferometric thin film measuring device has a source of illumination light, a detector disposed in a return path of light reflected from a specimen of illumination light, a plurality of wavelength filters that filter light into image channels, a weight vector calculating device that receives detected signals, a look-up table storage unit that stores calibration weight vectors, a weight vector comparing unit that compares calibration weight vectors from the look-up table storage unit to subject weight vectors, and a data output/storage unit to output the measured thin film values.
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