IMPROVED CORROSION RESISTANT COATING

摘要

A corrosion resistant part comprising a protective coating formed upon a component part. The protective coating comprises magnesium fluoride, which is substantially pure and substantially dense. Preferably, the coating is at least about 99% pure and at least about 85% dense. For example, such a coating can be formed upon the component part at a temperature of at least about 250 DEG C and a pressure of not more than about 1x10<-5> torr. The resulting coating is effective in protecting the surfaces of an aluminium nitride heater against corrosion within a fluorine-containing environment inside a chemical vapor deposition chamber.