发明名称 METHOD AND SYSTEM FOR MEASURING POLYCRYSTALLINE CHUNK SIZE AND DISTRIBUTION IN THE CHARGE OF A CZOCHRALSKI PROCESS
摘要 <p>A method and system for determining polycrystalline silicon chunk size for use with a Czochralski silicon growing process. Polycrystalline silicon chunks are arranged on a measuring background. A camera captures an image of the chunks. An image processor processes the image and determines the dimensions of the chunks based on the captured image. A size parameter associated with the chunks is determined.</p>
申请公布号 WO2000026446(A1) 申请公布日期 2000.05.11
申请号 US1999024934 申请日期 1999.10.22
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