发明名称 Soller slit and manufacturing method of the same
摘要 A soller slit is disclosed, which includes a plurality of metal foils and functions to restrict divergence of X-rays when arranged on an X-ray optical path. The metal foils are prepared by sintering a metal material such that surface thereof have high harmonic surface roughness. Alternatively, the metal foil has oxides formed by oxidation on the surfaces thereof such that the oxides can provide the high harmonic surface roughness. The high harmonic surface roughness of the metal foil restricts total reflection of X-rays at the metal foil. Therefore, it is possible to form high precision parallel X-ray beams by the soller slit to thereby improve resolution in an X-ray measurement. <IMAGE>
申请公布号 EP0999555(A1) 申请公布日期 2000.05.10
申请号 EP19990308462 申请日期 1999.10.26
申请人 RIGAKU CORPORATION 发明人 FUJINAWA, GO;UMEGAKI, SHIRO
分类号 G21K1/02;G21K1/06 主分类号 G21K1/02
代理机构 代理人
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