Method of forming via holes in an insulation film and method of cutting the insulation film

摘要

A method of forming via holes (6) in an organic insulation film (1) or cutting the film (1) comprises the steps of exposing predetermined parts of the film (1) to a laser beam to raise a temperature of the exposed parts of the film (1) until the exposed parts are transformed or decomposed and subjecting the film (1) to an ultra sonic wave (5) so that the transformed or decomposed parts are dispersed.