| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a slit coat type coating device and slit coat type coating method in which by monitoring the feed quantity of coating fluid to a coating head, the delicate variation of coating conditions can be coped with to enable obtaining the uniform film thickness of a high level. SOLUTION: In order to subject a substrate W to relative movement to a coating head 1 at velocity V to apply uniform film thickness T onto a coating film effective surface in a width L, by installing a flowmeter 50 for measuring a flow rate Q of coating fluid fed to the coating head 1, either the flow rate Q or the velocity V, or both Q, V are set so that the relationship: the film thickness T = the flow rate Q/the width L×the velocity V is established.</p> |
