发明名称 |
In-situ endpoint detection for membrane formation |
摘要 |
A method of in-situ endpoint detection for membrane formation including directing light from a light source onto one side of a membrane structure having at least one etchable component for the formation of a membrane and etching the membrane structure so as to form the membrane while sensing the light from the light source on an opposite side of the membrane structure in-situ during the etching to detect a thickness of the membrane. Generally, the etching step includes fountain cup etching with the light source being a fiber optic mounted in the fountain cup and a detector mounted in the cap.
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申请公布号 |
US6061137(A) |
申请公布日期 |
2000.05.09 |
申请号 |
US19980072756 |
申请日期 |
1998.05.04 |
申请人 |
MOTOROLA, INC. |
发明人 |
DAUKSHER, WILLIAM J.;MANGAT, PAWITTERJIT S. |
分类号 |
G01B11/06;(IPC1-7):G01B11/06 |
主分类号 |
G01B11/06 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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