| 摘要 |
<p>PROBLEM TO BE SOLVED: To provide a solidification accumulation electrode wherein exchange life of a solidification accumulation electrode (plasma electrode and ground electrode) is significantly elongated, disposal after exchange is compatible with environmental preservation and easy treatment can be performed. SOLUTION: In an unreacted gas cleaning apparatus wherein a plasma electrode 2 and a ground electrode 4 are helically formed and the two electrodes 2, 4 are arranged alternately, and the plasma electrode 2 and the ground electrode 4 are connected to a high frequency source and an inner wall of an apparatus, respectively, and an excess discharge gas of a semiconductor manufacturing system employing a CVD method and a plasma gas are supplied between the two electrodes 2, 4 and a coagulation constituent and a poisonous constituent contained in the gases are made to accumulate on the electrodes for removal, the plasma electrode 2 and the ground electrode 4 are formed by a conductive sheet made of a glass fiber sheet having a surface coated with a conductive substance.</p> |
