| 摘要 |
PROBLEM TO BE SOLVED: To obtain recording head having wiring electrodes excellent in reliability by arranging an electrothermal conversion element in each channel, and forming a recess in a substrate by an end face extending along a channel in an overlying layer wire electrode layer and a cut wider than the channel wall of a heat storage layer and an underlying wiring layer thereby making a deep recess for engaging the channel wall. SOLUTION: An ink jet recording head comprises a base part 84 being secured to the electrode face of a printed wiring board made of silicon, electrothermal conversion elements, i.e., heaters 94, 96, arranged in correspondence with respective ink channels 78bi on one end face, a common electrode layer 90 therefor and individual electrode layers 92, 98, and an ati-cavitation layer 86 for covering them through a protective layer 88. The ati-cavitation layer 86 has a relatively shallow recess 86b at a position corresponding to a part between the common electrode layer 90 and the individual electrode layers 92, 98 correspondence to respective ink channels 78bi. Between adjacent ink channels 78bi, it is formed in correspondence with a recess 86a for regulating the relative position of a barrier wall member 78ai to the common electrode layer 90 and the individual electrode layers 92, 98.
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