发明名称 |
GROOVE POLISHING METHOD FOR QUARTZ GLASS ROD |
摘要 |
PROBLEM TO BE SOLVED: To eliminate surface roughness of a polishing surface at low cost and to eliminate metal impurity generated by cutting groove working by a diamond blade by performing mirror finished surface polishing for a groove part of a quartz glass rod for which cutting groove working is performed by the diamond blade by a brush means for polishing. SOLUTION: After a polishing brush 22 is set to a quartz glass rod fixing base 34 at a desired angle by moving a rail for moving brush 16a on rails for moving rail 40a, 40b, a quartz glass rod in which a groove is formed by cutting groove working by a diamond blade is mounted and fixed on/to the quartz glass rod fixing base 34. By rotating a motor for rotating brush 24 and a motor for moving brush 30, the polishing brush 22 is rotated. By moving the polishing brush 22 along the rails for moving brush 16a, 16b, a groove part of a quartz glass rod 36 on the quartz glass rod fixing base 34 is polished by the polishing brush 22. |
申请公布号 |
JP2000127021(A) |
申请公布日期 |
2000.05.09 |
申请号 |
JP19980305541 |
申请日期 |
1998.10.27 |
申请人 |
SHINETSU QUARTZ PROD CO LTD;YAMAGATA SHINETSU SEKIEI:KK;ATOKKU:KK |
发明人 |
SUGAMA AKIHIKO;MATSUTANI TOSHIKATSU;MIZUNO TORU |
分类号 |
B24B19/03;B24B29/00;C03B20/00;C03C19/00;H01L21/22;(IPC1-7):B24B29/00 |
主分类号 |
B24B19/03 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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