发明名称 GROOVE POLISHING METHOD FOR QUARTZ GLASS ROD
摘要 PROBLEM TO BE SOLVED: To eliminate surface roughness of a polishing surface at low cost and to eliminate metal impurity generated by cutting groove working by a diamond blade by performing mirror finished surface polishing for a groove part of a quartz glass rod for which cutting groove working is performed by the diamond blade by a brush means for polishing. SOLUTION: After a polishing brush 22 is set to a quartz glass rod fixing base 34 at a desired angle by moving a rail for moving brush 16a on rails for moving rail 40a, 40b, a quartz glass rod in which a groove is formed by cutting groove working by a diamond blade is mounted and fixed on/to the quartz glass rod fixing base 34. By rotating a motor for rotating brush 24 and a motor for moving brush 30, the polishing brush 22 is rotated. By moving the polishing brush 22 along the rails for moving brush 16a, 16b, a groove part of a quartz glass rod 36 on the quartz glass rod fixing base 34 is polished by the polishing brush 22.
申请公布号 JP2000127021(A) 申请公布日期 2000.05.09
申请号 JP19980305541 申请日期 1998.10.27
申请人 SHINETSU QUARTZ PROD CO LTD;YAMAGATA SHINETSU SEKIEI:KK;ATOKKU:KK 发明人 SUGAMA AKIHIKO;MATSUTANI TOSHIKATSU;MIZUNO TORU
分类号 B24B19/03;B24B29/00;C03B20/00;C03C19/00;H01L21/22;(IPC1-7):B24B29/00 主分类号 B24B19/03
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