发明名称 Power transistor having vertical FETs and method for making same
摘要 A power transistor having of a plurality of vertical MOSFET devices combined in parallel to achieve high-performance operation and methods of fabricating this device.
申请公布号 US6060746(A) 申请公布日期 2000.05.09
申请号 US19970798663 申请日期 1997.02.11
申请人 INTERNATIONAL BUSINESS MACHINES CORPORATION 发明人 BERTIN, CLAUDE L.;GAMBINO, JEFFREY P.;MANDELMAN, JACK A.
分类号 H01L21/336;H01L29/423;H01L29/78;(IPC1-7):H01L29/76 主分类号 H01L21/336
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