VACUUM HEATING FURNACE

摘要

PROBLEM TO BE SOLVED: To provide a vacuum heating furnace which can execute the heating under high vacuum condition while restraining the heat-up of a flange in a radiant tube and has the excellent heat efficiency. SOLUTION: This vacuum heating furnace is composed of a vacuum furnace 1 and the radiant tube 2 insertionally disposed in the inner part thereof and fixing the flange 21 to a furnace body flange 111 of the vacuum furnace 1 and a heat storage type burner 3 fixed to the flange 21 of the radiant tube. In the inner part 20 of the radiant tube 2, the heat storage body 35 of the heat storage type burner, is disposed. An O-ring 6 for air-tightly holding is arranged between the flange 21 of the radiant tube and the furnace body flange 111 of the vacuum furnace. A water-cooling means 71 for water-cooling the O-ring 6 is arranged to at least one side of the flange 21 of the radiant tube and the furnace flange 111 of the vacuum furnace.