摘要 |
PROBLEM TO BE SOLVED: To provide a thermal ink jet head comprising heating elements generating uniform bubbles with high thermal energy efficiency and insusceptible to cavitation damage. SOLUTION: Heating elements 22 connected with a common electrode 18 and an individual electrode 21 and supplied with a heating pulse are formed under orifices (ink ejection nozzles). The heating element 22 is obtained by shaping a film of Ta-Si-O, or the like, formed by thin film technology into a plurality of flat linear heating elements 33 by photolithography and arranging the heating elements 33 in the center. The heating element 22 thus obtained generates a bubble with high thermal energy efficiency and cavitation damage has no effect on the heating element 22.
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