HARD FILM EXCELLENT IN WEAR RESISTANCE AND HARD FILM COATED MEMBER

摘要

PROBLEM TO BE SOLVED: To provide a hard film excellent in wear resistance and adhesion and to provide a hard film coated member in which the hard film has been formed. SOLUTION: In a hard film formed on the surface of a base material, the compsn. of a 1st layer formed on the base material side is composed of VxTiy [where 0<=x<=1, 0<=y<=1 and x+y=1 are satisfied], and the compsn. of a 2nd layer laminated on the surface side is composed of (VuTi1-u) (NvC1-v) [0.25<=u<=0.75 and 0.6<=v<=1 are satisfied]. The thickness of the 1st layer is desirably controlled to 5 to 500 nm, and the total thickness of the 1st layer and the 2nd layer is desirably controlled to 0.8 to 20μm. In the case the hard film is formed on the surface of the base material, a hard film coated member or a hard film coated tool excellent in wear resistance can be obtd.