| 摘要 |
PROBLEM TO BE SOLVED: To improve the durability by coating the periphery of an electroconductive substance particle with an oxide or an oxynitride layer consisting essentially of an RE (group 3a element of the periodic table)-Si or RE-Al-Si to a specific thickness. SOLUTION: The thickness of an oxide or an oxynitride layer consisting essentially of an RE-Si, etc., is 1-20 μm. The control of oxygen partial pressure during baking is important in effectively forming the coating layer on the surface of the electroconductive substance. When a ceramics heating element is baked, an Si-SiO2 mixture is simultaneously baked to thereby regulate the oxygen partial pressure. As a result, the coating layer is readily formed. The electroconductive substance may be one or more kinds of a nitride, a carbide and a silicide of groups 4a, 5a and 6a of the periodic table. MoSi2 is especially preferably used as the principal component. The average particle diameter of the electroconductive substance is preferably larger than the average particle diameter of silicon nitride and <=70 μm. |
