发明名称 Large area imager with photo-imageable interface barrier layer
摘要 This invention is related to a radiation image (e.g. X-ray imager) including a thin film transistor (TFT) array, and method of making same. A photo-imageable interface barrier layer is provided between an array of collector electrodes and a photoconductor layer so as to simplify the process for manufacturing the imager and to improve image uniformity. In certain embodiments, the barrier layer is a negative resist. In certain embodiments, the barrier layer and an insulating layer over the TFTs may be of the same photo-imageable material.
申请公布号 US6060714(A) 申请公布日期 2000.05.09
申请号 US19980012491 申请日期 1998.01.23
申请人 OIS OPTICAL IMAGING SYSTEMS, INC. 发明人 ZHONG, JOHN Z. Z.;DEN BOER, WILLEM;BYUN, YOUNG H.
分类号 H01L27/146;(IPC1-7):H01L31/115;G01T1/24 主分类号 H01L27/146
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