发明名称 |
Large area imager with photo-imageable interface barrier layer |
摘要 |
This invention is related to a radiation image (e.g. X-ray imager) including a thin film transistor (TFT) array, and method of making same. A photo-imageable interface barrier layer is provided between an array of collector electrodes and a photoconductor layer so as to simplify the process for manufacturing the imager and to improve image uniformity. In certain embodiments, the barrier layer is a negative resist. In certain embodiments, the barrier layer and an insulating layer over the TFTs may be of the same photo-imageable material.
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申请公布号 |
US6060714(A) |
申请公布日期 |
2000.05.09 |
申请号 |
US19980012491 |
申请日期 |
1998.01.23 |
申请人 |
OIS OPTICAL IMAGING SYSTEMS, INC. |
发明人 |
ZHONG, JOHN Z. Z.;DEN BOER, WILLEM;BYUN, YOUNG H. |
分类号 |
H01L27/146;(IPC1-7):H01L31/115;G01T1/24 |
主分类号 |
H01L27/146 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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