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发明名称
摘要
申请公布号
JPS4114645(Y1)
申请公布日期
1966.07.08
申请号
JP19640094684U
申请日期
1964.02.08
申请人
发明人
分类号
C30B15/10;H01L21/208;(IPC1-7):B01J17/20;B01J17/18
主分类号
C30B15/10
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代理人
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