发明名称 |
Compact shearing wavefront sensor and method |
摘要 |
A compact wavefront sensor includes an array of microlenses supported above a microchip. The microchip includes an array of gratings and photodetectors, which correspond to a particular microlens. Light incident on a grating will be diffracted back towards the array of microlenses, where it is focussed onto a corresponding photodetector. The photodetector receives light from gratings adjacent thereto, and detects a resulting interference therebetween. The detected interference is then used to reconstruct the wavefront. The detected interference can also be used to correct wavefronts by controlling a modulating element reflecting the wavefront.
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申请公布号 |
US6057913(A) |
申请公布日期 |
2000.05.02 |
申请号 |
US19980018341 |
申请日期 |
1998.02.04 |
申请人 |
MEMS OPTICAL INC. |
发明人 |
BROWN, DAN;CLARK, RODNEY L.;LINDSEY, RANDALL |
分类号 |
G01J9/02;(IPC1-7):G01J1/20 |
主分类号 |
G01J9/02 |
代理机构 |
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代理人 |
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主权项 |
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地址 |
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