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发明名称
Ringfield lithography
摘要
申请公布号
EP0523303(B1)
申请公布日期
2000.05.03
申请号
EP19910309020
申请日期
1991.10.02
申请人
AT&T CORP.
发明人
JEWELL, TANYA E.;THOMPSON, KEVIN
分类号
G02B17/00;G03F7/20;H01L21/027;(IPC1-7):G03F7/20;G02B17/06
主分类号
G02B17/00
代理机构
代理人
主权项
地址
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