VACUUM CHAMBER FOR DEPOSITION

摘要

PURPOSE: A multipurpose vacuum chamber for deposition is provided to improve the quality of a thin film by forming a rotary circle including a target holder, a substrate holder, and a gauge for measuring a thickness of a thin film located on a concentric circle. CONSTITUTION: A lock chamber(5) is connected directly to a vacuum chamber(4) in order to prevent the pollution of the vacuum chamber(4) from evaporated organic molecules by using an exhaust pump. The vacuum chamber(4) is combined with a flange(4a) in order to adhere an evaporator to a lower end of the vacuum chamber(4). A target holder(6), a substrate holder(7), a gauge for measuring a thickness of a thin film(8), and an optical glass(9) are located on a concentric circle of a rotary axis of a rotary circle(1).