| 摘要 |
A plurality of resistive regions constituting a root conductive layer gradually increase in width from one end to the other end and have substantially the same resistivity. If, therefore, this semiconductor position sensitive detector is placed such that charges generated in accordance with incident light from an object at a long distance flow into narrow resistive regions, since the narrow resistive regions have high resistances, the output currents from the two ends of the root conductive layer greatly change to improve the position detection precision even in a case wherein the incident light position only slightly moves on the light-receiving surface as the distance to the object changes. <IMAGE> |
