ACTIVE MATRIX LCD AND THE MANUFACTURING METHOD OF THE SAME

摘要

PURPOSE: An active matrix liquid crystal display and a method for manufacturing thereof are provided to eliminate pixel electrode and TFT terminals and reduce rubbing inferiority and a domain state by forming a protection layer through the spin coating of BCB(Benzocyclobutene). CONSTITUTION: A plurality of gate lines are horizontally patterned and formed on a substrate(1). Gate electrodes(2) are forked and formed from gate lines. An anode oxidation layer(4) is formed on the gate electrode(2). A gate insulating layer(5) is applied on the whole surface of the substrate(1). An a-Si layer as a semiconductor layer(6) and an n+ type a-Si layer as an ohmic contact layer(8) are successively deposited. The semiconductor layer(6) and the ohmic contact layer(8) are patterned. A metallic layer is applied on the whole surface in a sputtering method. The metallic layer is patterned, and then source lines, source electrodes(11), and drain electrodes(12) are formed. Spin-coated BCB is applied on the whole surface. After contact holes to connect the drain electrodes and pixel electrodes are formed, an ITO(Indium Tin Oxide) layer is applied on the whole surface in the sputtering method. The ITO layer is patterned in a photolithography or etching method so that the pixel electrodes(15) can be formed.