PACKAGING HAVING AU-LAYER, SEMICONDUCTOR DEVICE HAVING AU LAYER AND METHOD OF MOUNTING THE SEMICONDUCTOR DEVICE

摘要

A method of mounting a semiconductor device first forms a barrier layer on one surface of an semiconductor substrate made of Si. Then, a first Au layer is formed on the barrier layer. Accordingly, a semiconductor device is provided. The barrier layer is formed of metal for preventing mutual diffusion of Si in the Si semiconductor substrate with Au in the first Au layer at a high temperature of 600 DEG C. or higher. A step of acquiring a package substrate forms a metal coated layer on a base first and then forms a second Au layer on the surface of the metal coated layer. Then, the semiconductor device is placed on the package substrate with the first and second Au layers contacting with each other, and the semiconductor device and the package substrate are scrubbed against each other. Consequently, the first and second Au layers form Au-Au eutectic layer, thereby connect the semiconductor device to the package substrate.