发明名称 Field emission charge controlled mirror (fea-ccm)
摘要 A bright, high contrast, compact, large area, high-resolution light modulator uses a field emitter array (FEA) to address a charge controlled mirror (CCM). The FEA deposits a charge pattern onto the CCM, which in turn produces electrostatic forces that deflect the micromirrors in accordance with the amount of accumulated charge. The CCM that is used in combination with the FEA can be configured in many different ways to implement different actuation modes, e.g. attractive, repulsive, grid-actuated or membrane-actuated and different charge control modes, e.g. RC decay, RC sustain and charge control.
申请公布号 AU6497899(A) 申请公布日期 2000.05.01
申请号 AU19990064978 申请日期 1999.10.14
申请人 MEMSOLUTIONS, INC. 发明人 WILLIAM P. ROBINSON;MICHAEL J. LITTLE;ERIC A. GIFFORD
分类号 B81B3/00;G02B26/08;G09G3/22;H01J31/12;H04N5/68;H04N5/74 主分类号 B81B3/00
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