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发明名称
EQUIPMENT OF AND METHOD FOR PRODUCING SEMICONDUCTOR
摘要
申请公布号
KR100255254(B1)
申请公布日期
2000.05.01
申请号
KR19960020238
申请日期
1996.06.07
申请人
HITACHI, LTD.
发明人
MORIOKKA, HIROSI;NOKUCHI, MINORI;OSIMA, YOSIMISA;GEMBO, YUKKIO;TANIKUCHI, YUJO
分类号
H01L21/66;(IPC1-7):H01L21/66
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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