| 摘要 |
PURPOSE: A stage focus and horizontal adjustment apparatus and method thereof are provided to simultaneously adjust the horizontal degree and the focus degree of the entire stage using a linear charge coupled device as a light source. CONSTITUTION: A stage focus and horizontal adjustment apparatus includes three light sources(40) for illuminating a light to a stage(1). A slit(42) is located on a light axis to direct only a light of a specific polarized light from respective light sources to the stage(1). An objective(41) focuses the light illuminated from the light sources(40). At least three linear charge coupled device(CCD)(45a,45b,45c) receive the light reflected from at least three points of the stage(1) after they passed through the slit(42). An error detector detects the focus and a horizontal error from the signal received in each of the CCDs. An actuator(47) drives the stage based on the signal detected in the error detector.
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