| 摘要 |
PROBLEM TO BE SOLVED: To provide a resonance type accelerometer which is simple in structure and manufacture and has little error. SOLUTION: This accelerometer includes an upper cover, a lower cover, a beam 11 cantilevered between two covers, and a surface elastic wave resonator formed on the beam 11, wherein the acceleration is detected according to the change of resonance frequency of the surface elastic wave resonator 21A. In this case, the fixed end part of the beam 11 is clamped and supported between the projecting parts of the upper cover and the lower cover, the beam 11, the upper cover and the lower cover are joined to one another by a piercing screw to constitute a sensor unit 1, and the sensor unit 1 is installed on a fixed wall by a screw.
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