SUBSTRATE WITH LIGHT SHIELDING LAYER, ITS PRODUCTION AS WELL AS SPUTTERING TARGET, COLOR FILTER SUBSTRATE AND DISPLAY ELEMENT

摘要

PROBLEM TO BE SOLVED: To provide a substrate with light shielding layers which has the optical characteristics approximately equal to those of conventional chromium films, excellent in durability and is kind to the environment. SOLUTION: The substrate with the light shielding layers including at least one layer of the light shielding layers 2 and low reflection layers 2 consisting of metals and/or metal compounds which consists essentially of nickel(Ni) and titanium(Ti) on a substrate 1 and in which the composition of Ti is 15 to 70%, more preferably 25 to 65% of the total sum of Ni and Ti in atomic ratios is usable particularly for display elements (for example, liquid crystal display elements), etc., as the substrate with the light shielding layers which solves the problem described above, has the excellent optical characteristics and durability and is kind to the environment. More particularly the substrate with the light shielding layers is preferably formed of the structure obtained by successively forming low reflection layers 3 and light shielding layers 2 having the composition described above on the substrate 1.