| 摘要 |
PROBLEM TO BE SOLVED: To correct the distortion of an image due to fluctuations of a table in a horizontal scanning direction at a low cost with a high precision. SOLUTION: Prior to a read of an image of an object OB to be inspected, a reference sample for correction which has a reference line is prepared and held on the table 1 so that the reference line is almost parallel to a vertical scanning direction Y, and the reference sample for correction is read by an image reader to obtain an image for correction. According to the image for correction, the fluctuation quantity of the image in the horizontal scanning direction X due to the relative movement of the table 1 is found as correction data. Then the object OB to be inspected is actually picked up and its image is corrected according to the correction data. |
