| 摘要 |
PROBLEM TO BE SOLVED: To reduce an installation space, to decrease the number of sensors, and to shorten the line process unit time, etc., by providing a tip end part of a thin substrate transfer robot hand with an optical mapping/seating confirmation shared sensor, which acts both as an optical mapping sensor and as optical seating confirmation sensor. SOLUTION: Related to a hand 1, a tip end part of an expansion arm is connected to a base part 2, and a pair of, left and right, holding plates 4A and 4B of drop-in-type which hold a discoidal substrate 3 are held at the base part 2. A pair of, left and right, sensor holding parts 9A and 9B are provided at the tip end part of each of holding plate parts 4A and 4B, and the sensor holding parts 9A and 9B hold an optical mapping/seating confirmation shared sensor 10 which acts both as an optical mapping sensor for detecting the presence of the discoidal thin substrate 3 and as an optical seating confirmation sensor for confirming that the discoidal thin substrate 3 is placed on the hand 1. |
