| 摘要 |
PROBLEM TO BE SOLVED: To provide a surface emitting laser module, which can be manufactured in a simple manufacturing process and also is high in output efficiency. SOLUTION: A surface emitting laser module 10 is constituted into such a structure that the module 10 is provided with a semiconductor substrate 18, an upper side clad layer 14, an active layer layer 12 and a lower side clad layer 16, which are laminated in order. The laser module 10 is provided with a surface emitting semiconductor light amplifier having lower and upper electrodes 20 and 22 which are respectively formed on the lower surface of the layer 16 and on the upper surface of the substrate 18, and an optical film 24 provided on the upper side of the substrate 18, a plurality of diffusion gratings 24a having constant intervals are formed in the interior of the optical film 24, and an optical resonance can be generated between the diffraction gratings 24a within the optical film 24 and the electrode 20 to act as a reflecting mirror.
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