发明名称 SUBSTRATE FOR RECORDING MEDIUM AND ITS PRODUCTION
摘要 PROBLEM TO BE SOLVED: To impart such constitution which can easily make the region width of projecting parts to the light source wavelength at the time of exposure or below in a substrate for the recording medium formed with periodically arrayed rugged shapes on one surface by using a photolithography technique. SOLUTION: The magneto-optical recording medium 1 is constituted by successively laminating a first protective film 3 consisting of a silicon nitride film, for example, a magneto-optical recording film 4 consisting of a Tb-Fe-Co amorphous alloy and a second protective film 5 consisting of a silicon nitride film on a carrier substrate 2 as a substrate for recording media consisting of, for example, an Si substrate. The projecting parts 6 and recessed parts 7 are periodically arranged in a recording track direction (arrow T direction) atop the carrier substrate 2. The region width S1 of the projecting parts 6 is smaller than the wavelength of the light source at the time of exposure and is formed at every other n-times (n is an integer of >=2) of the region width S1 of the projecting parts 6 in the recording trach direction.
申请公布号 JP2000123431(A) 申请公布日期 2000.04.28
申请号 JP19980289769 申请日期 1998.10.12
申请人 DENSO CORP;TOYOTA GAKUEN 发明人 KAWAHARA NOBUAKI;OOHARA ATSUSHI;SUZUKI TAKAO
分类号 G11B5/82;G11B5/73;G11B5/84;G11B11/10;(IPC1-7):G11B11/10 主分类号 G11B5/82
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