FORMATION OF PROTECTIVE FILM FOR MAGNETIC RECORDING MEDIUM OR OF SLIDER FOR MAGNETIC RECORDING

摘要

PROBLEM TO BE SOLVED: To form a thin protective film excellent in durability by forming a silicon nitride or aluminum nitride film between a carbon film and a substrate or between the carbon film and a film present under the carbon film to enhance adhesive strength between them. SOLUTION: A silicon nitride or aluminum nitride film is formed before the formation of an amorphous carbon film. The amorphous carbon film and the silicon nitride or aluminum nitride film are formed by ECR sputtering and an AlTiC substrate (a ceramic substrate comprising a mixture of alumina and titanium carbide) or the like is used as a substrate. When the carbon film is directly formed on the AlTiC substrate, the depth of wear increases suddenly under a prescribed load. When a silicon nitride film is formed, the depth of wear increases slowly. The silicon nitride film is remarkably effective in enhancing the adhesive strength of the carbon film.