| 摘要 |
PROBLEM TO BE SOLVED: To provide an auto-loader which can arrange many cassettes therein without the need for increasing occupancy space, and also to provide a substrate processor using the auto-loader. SOLUTION: In this auto-loader in a substrate processor for carry in and out a substrate 9 between cassettes 51 and 52 and a load-lock chamber, a first cassette holder 61 and a second cassette holder 62 provided thereunder are moved vertically as an integral unit by a vertically moving mechanism 65 for adjusting the position of the first or second cassette 51 or 52 relative to a substrate holding arm 63 and to load or remove the substrate 9 into or our of the cassette 51 or 52. When the substrate holding arm 63 loads or removes the substrate 9 in or our of the first cassette 51, the second cassette 52 is located within a shield box defined by first and second supporting plates 610 and 620, left and right side plates 64, and front and rear shield plates 672. |
