| 摘要 |
<p>PROBLEM TO BE SOLVED: To make it possible to inspect even a narrow portion of a surface which is inaccessible by the interference with the front end of a microscope, such as the surface near the bonding wire of a package type semiconductor chip with the microscope for inspecting the defect of a semiconductor device, etc. SOLUTION: The condenser device disposed at the microscope has a main body 44 having a cylindrical reflection surface 46 constituting a curvilinear surface therein. The focus 50 thereof exists at a position apart from the end 52 of the main body. The surface 32 to be inspected is placed at the focus, by which the light radiated at an angle 66 of a wide range from the surface is collimated along the optical axis 22 and is imaged at the focus 62 of an objective lens 60 by a condenser lens 56. If the condenser device is constituted in the manner described above, even the laterally spreading rays may be captured while the narrow portion of the surface 32 is made accessible by reducing the size of the main body. Image pickup with a small light quantity is thus made possible.</p> |
