| 摘要 |
PROBLEM TO BE SOLVED: To make it possible to shape a laser oscillation waveform at all times with time into a uniform optional shape necessary for an object to be irradiated by laser, by giving the generation timing of voltage value and voltage pulse by which the pulse generator for every laser oscillator is charged, through a central processing unit. SOLUTION: Every optical paths of laser lights 30-32 emitted from laser discharge tubes 21-23 are overlapped and led to make one optical path, and a part of waveform of laser light and a laser output energy of the synthesized laser light 35 are monitored by a sensor 39. Then, the shape of laser light waveform and laser output energy from the sensor 39 is received by a central processing unit 40, and it sends a charging voltage value which is computed as to shape the shape of the laser light waveform and the laser output energy into a desired shape, as well as a command value of oscillation timing to pulse generators 24-26 and high-voltage power supplies 36-38, thereby changing them within a width of laser oscillation pulse.
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