发明名称 METHOD FOR EVALUATING REFLECTANCE OF CERAMICS MIRROR
摘要 PROBLEM TO BE SOLVED: To provide a method for evaluating a reflectance of a mirror having a reflecting film on a substrate of a ceramics material with which the reflectance can be estimated before the reflecting film is formed. SOLUTION: According to the method, a reflectance of a ceramics mirror having a film including at least a reflecting film on a ceramics substrate is evaluated. In a first step, an area ratio of defect parts (h1-h8) present on an upper face of the ceramics substrate to the upper face of the substrate is measured in a state before the film is formed. In a second step, a reflectance corresponding to the ratio obtained in the first step is obtained from a preliminarily obtained relationship of the ratio and a reflectance of the ceramics mirror after the film is formed.
申请公布号 JP2000121492(A) 申请公布日期 2000.04.28
申请号 JP19980290773 申请日期 1998.10.13
申请人 NIKON CORP 发明人 TSUSHIMA MITSUO
分类号 G01M11/00;(IPC1-7):G01M11/00 主分类号 G01M11/00
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