THIN FILM ACTUATED MIRROR ARRAY HAVING BURIED VIA CONTACT AND ITS FABRICATION METHOD

摘要

PURPOSE: A thin film type light road controller having a reclaimed via contact and a method for manufacturing are provided to simplify a manufacturing process and form a large-sized via hole by forming a via contact under a lower electrode in advance. CONSTITUTION: An active matrix(100) has a built-in MOS transistor to approve the first signal from outside and perform a switching operation. The active matrix(100) involves a protective layer(110) laminated on the active matrix(100) and a drain pad(105) and an etching preventing layer(115) laminated on the protective layer(110). An actuator(200) comprises a supporting layer(125) contacted with the drain pad(105) and formed in parallel with the etching preventing layer(115) with an air gap(155), a lower electrode(130) laminated on the supporting layer(125), a strain layer(135) laminated on the lower electrode(130), and an upper electrode(140) laminated on the strain layer(135). A via contact(130) is formed inside of a via hole formed vertically from the supporting layer(125) to the drain pad(105). The via contact(130) connects the lower electrode(140) and the drain pad(105) electrically.