发明名称 SEMICONDUCTOR MANUFACTURING APPARATUS, INFORMATION PROCESSOR AND MANUFACTURING DEVICE
摘要 PROBLEM TO BE SOLVED: To accurately estimate the time taken for completing all processes by comprising means for estimating and calculating the required time for the processes prior to receipt of a new process request. SOLUTION: A host unit 21 transfers a JOB file to be processed to consoles 23, 25, 27 attached to manufacturing apparatus, 24, 26, 28 in a broadband system, together with pre-process request signals for examining the JOB process time. Each of consoles 23, 25, 27 receives the transferred JOB file and inserts it to the last of a virtual JOB array. When a JOB file which is newly sent from the host unit 21 is inserted in the virtual JOB array, the contents of header parts and data parts in the file are examined serially in detail, to execute an optimum process for the manufacturing units to most efficiently process according to control programs running on the consoles.
申请公布号 JP2000124095(A) 申请公布日期 2000.04.28
申请号 JP19980304715 申请日期 1998.10.13
申请人 CANON INC 发明人 SUZUKI DAISUKE
分类号 H01L21/027;H01L21/00;H01L21/02;(IPC1-7):H01L21/02 主分类号 H01L21/027
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