| 摘要 |
PROBLEM TO BE SOLVED: To suppress wasteful power consumption and undue electromagnetic force and driving of a plurality of moves, which are mounted on the stator table in a drive circuit, with stability even if the movers are moved separately. SOLUTION: This linear electromagnetic micro actuator has movers of magnetic material mounted on a stator table with very small flat coils 2 arranged in a check pattern and moves the movers on the stator table by sequentially switching excitation of the flat coils selected in accordance with the path of mover movement. The flat coils 2 are connected between the wires 8 and 9 on the 'rows' and 'columns' of feeders wired in a check pattern to form a coil matrix 7, and switching elements 5 and 6 are connected with each wire on the 'rows' and 'lines' of the coil matrix 7 to form a drive circuit. Two wires 8a, 8b, 9a and 9b are led out of each 'row' and each 'column' of the coil matrix 7, and the switching elements 5 and 6 are connected with each of the wires. Every other flat coil 2 placed between the 'columns' and between the 'rows' is alternately connected with the two wires 8a, 8b, 9a and 9b.
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