| 摘要 |
PROBLEM TO BE SOLVED: To feed cooling water for a chemical which has little temperature change, without making large-size a cooling water thermosatic apparatus for chemicals. SOLUTION: This device is a cooling water thermostatic apparatus for chemicals, which has a chemical treating tank, a heat exchanger for cooling a chemical in this chemical treating tank, tube parts 170a and 170b for feeding cooling water for chemical to this heat exchanger, a cooling part 190 which is exclusively used for the cooling water for making this cooling water hold at a constant temperature, a first refrigerant carrying part 210b for feeding a refrigerant to the cooling part 190 and a second refrigerant carrying part 210a which is fed the refrigerant from the cooling part 190. Here, the carrying part 210b is provided with a refrigerant carrying part 211b for heating for raising the temperature of the cooling part 190 and a refrigerant carrying part 212b for cooling, for lowering the temperature of the cooling part 190.
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