| 摘要 |
PROBLEM TO BE SOLVED: To provide a load lock device which is strengthened in dustproofness for enhancing the throughput of an aligner. SOLUTION: An inner wall surface 11a of a load lock chamber 11 of a load lock device is made a mirror-finished surface. Vacuum valves 12 and 14 and the drive section 13a of a lifting and lowering table 13 are arranged outside the load lock chamber 11. Furthermore, a space between the table 13 and the wall of the load lock chamber 11 is hermetically sealed by a bellows 21. |
