| 摘要 |
PROBLEM TO BE SOLVED: To prevent the operation failure of a pressure adjuster by removing impurity in gas flowing through a gas flow passage. SOLUTION: A gas entrance part 15 of a pressure adjuster is provided with a net filter 19 and an orifice place 21 from the upstream side. Relatively large impurity is removed by the net filter 19. Plural small holes 21a are formed in the circumferential direction in the neighborhood of the outer peripheral part of the orifice plate 21, and gas including impurity is allowed to pass through the small holes 21a. Then, a negative pressure is generated on the surface of the orifice plate 21 in the surrounding of the downstream side of the small holes 21a, and the impurity is involved in this negative load so as to be adhered to the orifice plate 21.
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