| 摘要 |
<p>PROBLEM TO BE SOLVED: To increase the container housing capacity of a container mounting unit by providing a third position for keeping in standby a substrate container between a first position where a substrate to be treated is taken in and out of the substrate container and a second position where the substrate container is taken in and out between an external conveyor. SOLUTION: A waiting part (third position) 31 is provided for staying a plurality of carrier cassettes CR between a cassette mount (second position) 20 of a container mounting unit 30 and an auxiliary arm 21. The cassette CR housed in a container housing is carried to a home access position (first position) between the cassette mount 20 and the arm 21. The arm 21 takes an untreated wafer W out and transfers it to a main arm 22, and sets the wafer W on treating units G1,..., to apply required treatments. Thus, a plurality of carrier cassette CR are housed in the vertical direction of the waiting part 31 and hence the housing ability of the carrier cassette CR can be improved.</p> |
