| 摘要 |
PROBLEM TO BE SOLVED: To reduce the coefficient of friction of the surface of a magnetic recording medium and various structural parts and to enhance the reliability of recording by adding a group IV element to a carbon or carbon-base coating formed on a magnetic thin film. SOLUTION: A protective film comprising diamondlike carbon(DLC) containing at least one group IV element is formed on the magnetic film of a magnetic recording medium. The concentration of the element in the 1st region of the protective film is higher than that in the 2nd region of the protective film and the 1st region is nearer to the substrate than the 2nd region. Silicon or germanium is used as the group IV element and the amount of silicon contained in the DLC is <=20 at.%, preferably 1-15 at.%. The concentration of the impurity decreases from the interface between the magnetic film and the DLC film toward the surface of the DLC film.
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