JOINTING METHOD FOR SILICON MADE SPECTROSCOPIC CRYSTAL

摘要

PROBLEM TO BE SOLVED: To surely and stably joint the element side crystal and the water channel side crystal of silicon-made spectroscopic crystal without degrading the performance as spectroscopic crystal. SOLUTION: The jointing surfaces of element side crystal 1 and water channel side crystal 2 of silicon-made spectroscopic crystal having a water channel are ground into mirror surfaces. At least on the jointing surface of the water channel side crystal 2, jointing materials 3 and 4, aluminum or gold are spread by spattering. The jointing surfaces are coupled and loaded and are heated. By this jointing method for silicon-made spectroscopic crystal, various superior effects can be obtained such that the jointing of the element side crystal and water channel side crystal is favorable and the performance as a spectroscopic crystal is good.