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发明名称
Method of forming a via plug in a semiconductor device and a semiconductor device using its method
摘要
申请公布号
HK1010423(A1)
申请公布日期
2000.04.28
申请号
HK19980110979
申请日期
1998.09.25
申请人
HYUNDAI ELECTRONICS INDUSTRIES CO. LTD.
发明人
KYEONG KEON CHOI
分类号
H01L21/768;(IPC1-7):H01L
主分类号
H01L21/768
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